This a very good news to implement the scope of our MEMs design on lab.
MicroDyn Microwave plasma enhanced sputter
CVC RF Magnetron sputter
Sub-One Hollow Cathode PECVD
Satis E-beam evaporator
Nordiko DC/RF Sputter
RIE/PECVD
Plasmalab PECVD
Siemens X-ray diffraction
Hitachi SEM
AFM/Nanoindentation
Contact Details
Dr. Richard Yongqing Fu
Reader in Thin Film Centre,
E209, Henry Building East
University of the West of Scotland
Tel: 44 (0) 141 8483563
E-mail: richard.fu@uws.ac.uk
www.thinfilmcentre.co.uk/
http://www.eps.hw.ac.uk/~ryf1/Thin%20Film%20Centre%20Equipment.htm
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