DURST LTCC

This company provides LTCC software design for manufacturing with a trial version. I have not tried it yet, however I think that this software is very powerful. DURST Courtesy
	CAD-Software-Lösungen für den Bereich Hybrid-, LTCC- und HF-Design

	CAD Daten Konverter
Grafik und PCB Layout Software	Konvertertool für zahlreiche Formate	Dick- /Dünnfilm und LTCC- Layout Software

HYDE-Prospekt im PDF-Format ca. 3,5 MB

Here is the link http://www.durst.de/produkte_hyde.html

Contact them if you think it might worth it for your nanofabrication.